1 February 1996 Touchless interferometric dimension comparator
Author Affiliations +
A touchless interference method that can be used to calibrate gauge blocks or length bars with lengths from 0.01 mm up to 1 m is proposed. The method is based on a comparison of two gauges, with one of them used as a reference. Polychromatic synthesized light from three laser diodes is used to determine end surface positions. Distances referring to these positions are measured by a wavelength-stabilizedlaser interferometer. Error sources are analyzed in this method. The accuracy of the comparison depends on the accuracy of the interferometer used to measure displacement. In the case of long gauge blocks, accuracy is limited mainly by uncertainty in the gauge block temperature.
Marek Dobosz, Marek Dobosz, Hirokazu Matsumoto, Hirokazu Matsumoto, Shige Iwasaki, Shige Iwasaki, } "Touchless interferometric dimension comparator," Optical Engineering 35(2), (1 February 1996). https://doi.org/10.1117/1.600920 . Submission:


Three-Dimensional Interferometer System
Proceedings of SPIE (April 02 1989)
MAM testbed data analysis: cyclic averaging
Proceedings of SPIE (February 25 2003)
The Optical Origin Drift And Its Effects On A Fringe...
Proceedings of SPIE (April 02 1989)
Interferometric dimension comparator
Proceedings of SPIE (September 21 2003)

Back to Top