1 May 1996 Checking-up of optical graduated rules by laser interferometry
Author Affiliations +
The main aspects related to the operating principle, design, and implementation of high-productivity equipment for checking-up the graduation accuracy of optical graduated rules used as a length reference in optical measuring instruments for precision machine tools are presented. The graduation error checking-up is done with a Michelson interferometer as a length transducer. The instrument operation is managed by a computer, which controls the equipment, data acquisition, and processing. The evaluation is performed for rule lengths from 100 to 3000 mm, with a checking-up error < 2 ?m/m. The checking-up time is about 15 min for a 1000-mm rule, with averaging over four measurements.
Nicolae Miron, Nicolae Miron, Dan G. Sporea, Dan G. Sporea, } "Checking-up of optical graduated rules by laser interferometry," Optical Engineering 35(5), (1 May 1996). https://doi.org/10.1117/1.600632 . Submission:


New type of on the fly scanning data acquisition system...
Proceedings of SPIE (January 01 1900)
Graduating rules checking up by laser interferometry
Proceedings of SPIE (September 30 1991)
Status of the GEO600 gravitational wave detector
Proceedings of SPIE (February 25 2003)
Fine mechanics products checking by laser interferometry
Proceedings of SPIE (November 29 1994)

Back to Top