1 May 1996 New diffractive beam shaper generated with the aid of e-beam lithography
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Abstract
A diffractive optical element has been fabricated which converts a Gaussian CO2-laser beam into a flat-top rectangle. This was accomplished by enhanced photolithographic technology with e-beam generated masks. Experimental patterns of the shaped intensity for a single-mode CO2 laser are presented.
Michael A. Golub, Michael A. Golub, Michael Rudolf Duparre, Michael Rudolf Duparre, Ernst-Bernhard Kley, Ernst-Bernhard Kley, Richard M. Kowarschik, Richard M. Kowarschik, Barbara Luedge, Barbara Luedge, Werner Rockstroh, Werner Rockstroh, Hans-Joerg Fuchs, Hans-Joerg Fuchs, } "New diffractive beam shaper generated with the aid of e-beam lithography," Optical Engineering 35(5), (1 May 1996). https://doi.org/10.1117/1.600697 . Submission:
JOURNAL ARTICLE
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