1 June 1996 Sensitivity-variable moire topography with a phase shift method
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Abstract
We propose a projection moire´ topography with a phase shift method for measuring the fine profile of an object. In this method, a set of interference fringes made using a Mach-Zehnder interferometer and a dove prism is projected on an object surface to generate moire´ fringes. The interval between the moire´ fringes can be easily changed in a range of 160 to 300 µm and we can realize sensitivity-variable moire´ contouring. Also, the phases of the moire´ -fringe pattern are easily changed by shifting one of the interference fringe patterns and the depth at each point on the object are computed with a high accuracy from the several moire´ -fringe patterns with different phases. Although the interferometer is used in the system, the setup is robust against vibrations.
Tetsuya Matsumoto, Tetsuya Matsumoto, Yoichi Kitagawa, Yoichi Kitagawa, Takumi Minemoto, Takumi Minemoto, } "Sensitivity-variable moire topography with a phase shift method," Optical Engineering 35(6), (1 June 1996). https://doi.org/10.1117/1.600759 . Submission:
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