Design and simulation of permissible tolerance during fabrication of infrared-induced transmission filters

Fei Ming Tong; Nuggehalli M. Ravindra; Walter F. Kosonocky

doi:10.1117/1.601226

1 February 1997 Design and simulation of permissible tolerance during fabrication of infrared-induced transmission filters

Fei Ming Tong, Nuggehalli M. Ravindra, Walter F. Kosonocky

Author Affiliations +

Optical Engineering, Vol. 36, Issue 2, (February 1997). https://doi.org/10.1117/1.601226

The design and simulated performance characteristics of narrow band-induced transmission infrared filters in the wavelength range of 2000 to 4500 nm are presented. These dielectric-spacer-metal-spacerdielectric (D-S-M-S-D) filter structures are composed of Si as high index dielectric (D) and Al2O3 as low index dielectric (D) or spacer (S) and Al as the metal (M). Typically, a total of 10, 12, or 13 layers are required with an aluminum layer in the middle of the filter stack. The bandwidth of these filters is in the range of 20 to 25 nm. Rejection of these filters in the long wavelength range is very good. The effect of thickness errors on the performance of filters has been analyzed. Based on the numerical simulation of an actual fabrication process, the permissible tolerance for process monitoring is investigated. Numerical simulations show that a high production yield may be obtained if the reflectance errors are kept within ±0.1% during process monitoring in the manufacture of these filters.

Citation Download Citation

Fei Ming Tong, Nuggehalli M. Ravindra, and Walter F. Kosonocky "Design and simulation of permissible tolerance during fabrication of infrared-induced transmission filters," Optical Engineering 36(2), (1 February 1997). https://doi.org/10.1117/1.601226

Published: 1 February 1997

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available