Tradeoffs in micro-opto-electro-mechanical system materials

Cleopatra Cabuz

doi:10.1117/1.601330

1 May 1997 Tradeoffs in micro-opto-electro-mechanical system materials

Cleopatra Cabuz

Optical Engineering, Vol. 36, Issue 5, (May 1997). https://doi.org/10.1117/1.601330

To build three-dimensional micro-opto-electro-mechanical systems (MOEMS), new materials have to be designed. However, increased manufacturability results generally in modified/degraded optical, mechanical, and electrical characteristics. The paper presents a detailed analysis of p + silicon as an opto-electro-mechanical material for microresonators, and gives some hints on the problems associated with the use of low-temperature dielectric in electrostatic microactuators. All the relevant parameters of p + silicon are experimentally determined and process recommendations allowing improved quality are formulated. Charge injection and trapping in low-temperature dielectric are analyzed and their impact on the behavior of the electrostatic actuators evaluated.

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Cleopatra Cabuz "Tradeoffs in micro-opto-electro-mechanical system materials," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601330

Published: 1 May 1997

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