Interferometric measurements of small-scale surface irregularities: source of errors

Parameswaran Hariharan

doi:10.1117/1.601460

1 August 1997 Interferometric measurements of small-scale surface irregularities: source of errors

Parameswaran Hariharan

Optical Engineering, Vol. 36, Issue 8, (August 1997). https://doi.org/10.1117/1.601460

Interferometry has been used widely to evaluate the largescale deviations from flatness of optical surfaces. However, when making measurements of small-scale irregularities with very small amplitudes, over a wide range of spatial frequencies, errors can arise due to scattered light and the transfer function of the imaging system. A theoretical analysis of these errors showing how they can be minimized is presented.

Citation Download Citation

Parameswaran Hariharan "Interferometric measurements of small-scale surface irregularities: source of errors," Optical Engineering 36(8), (1 August 1997). https://doi.org/10.1117/1.601460

Published: 1 August 1997

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available