1 December 1997 Three-dimensional displacement measurement using diffractive optic interferometry
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Optical Engineering, 36(12), (1997). doi:10.1117/1.601571
Abstract
A powerful new optical method that utilizes diffractive optic interferometry (DOI) to measure both in-plane and out-of-plane displacement with variable sensitivity using the same optical system is introduced. Sensitivity is varied utilizing various combinations of the different wavefronts produced by a conjugate pair of binary optical elements; a transmission grating is used to produce several illumination beams, while a reflective grating, replicated on the surface of a specimen, provides the reference for the undeformed state. A derivation of the equations that govern the method is included along with a discussion of the experimental tests conducted to verify the theory. Overall, the results are excellent, with experimental data agreeing to within a few percent of the theoretical predictions.
John A. Gilbert, Robert L. Shepherd, Helen Johnson Cole, Paul R. Ashley, "Three-dimensional displacement measurement using diffractive optic interferometry," Optical Engineering 36(12), (1 December 1997). http://dx.doi.org/10.1117/1.601571
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KEYWORDS
Diffraction gratings

Mirrors

Diffraction

Interferometry

Wavefronts

Fringe analysis

Optical testing

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