1 December 1997 Three-dimensional topometry with stereo microscopes
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Optical Engineering, 36(12), (1997). doi:10.1117/1.601576
Abstract
A stereo microscope arrangement used for visual quality inspection is extended to a fast 3-D topometer using the fringe projection technique. With specially designed binary gratings, an ideal sinusoidal intensity distribution can be achieved for an optimized illumination. Using a two-grating technique, the unambiguity range can be increased significantly. Thus, various applications can be solved with this method as is discussed. The resolution that can be achieved depends on the field of view, which at a large magnification is below 0.2 ?m.
Robert Windecker, Matthias Fleischer, Hans J. Tiziani, "Three-dimensional topometry with stereo microscopes," Optical Engineering 36(12), (1 December 1997). http://dx.doi.org/10.1117/1.601576
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KEYWORDS
Microscopes

Fringe analysis

Optical inspection

3D metrology

Binary data

Data acquisition

Phase shifts

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