1 December 1997 Ultra-high-resolution optical monitoring system using a noise cancellation technique
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The feasibility of using bi-detectors or quad-detectors for ultra-high-resolution position-monitoring systems is explored. Factors that can affect the resolution of this kind of detection system are examined. We find that one of the major limiting factors is the shifting of the laser beam. A noise cancellation technique is developed successfully to suppress this noise. Using this noise cancellation system together with a thermally compensated laser and a pinhole spatial filter in a temperatureand vibration-controlled environment, the feasibility of ultrahigh resolution (< 20 Å) for displacement monitoring is demonstrated using off-theshelf components.
Neville K. S. Lee, Neville K. S. Lee, Yimin Cai, Yimin Cai, Alfred K. K. Wong, Alfred K. K. Wong, Ajay Joneja, Ajay Joneja, } "Ultra-high-resolution optical monitoring system using a noise cancellation technique," Optical Engineering 36(12), (1 December 1997). https://doi.org/10.1117/1.601574 . Submission:

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