1 February 1997 Thermal wave pyroelectric thin film hydrogen sensor with extended detection dynamic range
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Optical Engineering, 36(2), (1997). doi:10.1117/1.601219
Abstract
A novel thermal wave based pyroelectric thin film solid state sensor shown to be capable of responding to H2 gas flows in N2 or in air under ambient temperature and pressure conditions is described. The new sensor exhibits an extremely wide detection dynamic range: 100% to 25 ppm hydrogen in nitrogen, and a 10 to 90% signal rise time of approximately 10 s, limited by the inertia of the gas delivery system. The extended dynamic range is achieved through two complementary operating mechanisms, resulting in a thermophysical and a chemical response at high and low H2 concentrations, respectively.
Leonid Dorojkine, Andreas Mandelis, "Thermal wave pyroelectric thin film hydrogen sensor with extended detection dynamic range," Optical Engineering 36(2), (1 February 1997). http://dx.doi.org/10.1117/1.601219
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KEYWORDS
Sensors

Hydrogen

Nitrogen

Chemical elements

Capacitance

Thin films

Electrodes

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