1 May 1997 Continuous-membrane surface-micromachined silicon deformable mirror
Author Affiliations +
Optical Engineering, 36(5), (1997). doi:10.1117/1.601598
Abstract
The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces.
Thomas G. Bifano, Raji Krishnamoorthy Mali, John Kyle Dorton, Julie A. Perreault, Nelsimar Vandelli, Mark N. Horenstein, David A. Castanon, "Continuous-membrane surface-micromachined silicon deformable mirror," Optical Engineering 36(5), (1 May 1997). http://dx.doi.org/10.1117/1.601598
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KEYWORDS
Actuators

Mirrors

Deformable mirrors

Silicon

Microelectromechanical systems

Oxides

Surface micromachining

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