1 May 1997 Micro-opto-mechanical beam defectors
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Abstract
The utilization of micro-optical components in systems for optical-beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the micro-optical components for efficient beam manipulation is quite small, high-speed actuators with small electrical power consumption can be used. We present a variety of micro-optical configurations and discuss their potential for the creation of different types of miniaturized scanners and switches. The combination of micro-optical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications.
Steffen Gloeckner, Rolf Goering, Torsten Possner, "Micro-opto-mechanical beam defectors," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601332
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