1 May 1997 Micromachined electromagnetic scanning mirrors
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Optical Engineering, 36(5), (1997). doi:10.1117/1.601348
Abstract
We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved.
Raanan A. Miller, Yu-Chong Tai, "Micromachined electromagnetic scanning mirrors," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601348
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