1 May 1997 Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results
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Abstract
Micro-electro-mechanical deformable mirrors (MEM-DMs) are solid-state electronic devices with small, movable reflective surface elements that can be used to manipulate the phase of optical wavefronts. MEM-DMs differ from more conventional continuous-facesheet deformable mirrors in that the movable surface of a MEM-DM consists of a set of segmented moving surfaces. The segmented, reflective surfaces of a MEM-DM give rise to larger diffraction effects than those provided by continuous-facesheet deformable mirrors. However, MEM-DMs are still attractive due to their low cost and the low drive voltages. We explore the theoretical limits of performance of MEM-DMs for controlling fixed aberrations in optical systems, and we present laboratory results demonstrating reduction of a fixed aberration using a MEM-DM device. Results presented here show that while a MEM-DM does provide some degree of aberration control, diffraction effects arising from the static support structures of the MEM-DM surface are significant. An alternative design that uses a lenslet array in conjunction with the MEM-DM is shown through theoretical studies to provide superior aberration correction with lower residual effects due to diffraction.
Michael C. Roggemann, Michael C. Roggemann, Victor M. Bright, Victor M. Bright, Byron M. Welsh, Byron M. Welsh, Shaun R. Hick, Shaun R. Hick, Peter C. Roberts, Peter C. Roberts, William D. Cowan, William D. Cowan, John H. Comtois, John H. Comtois, } "Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601355 . Submission:
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