1 August 1997 High-resolution multidimensional displacement monitoring system
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Abstract
The possibility of using quadrant detectors to develop a new optical system that can monitor all six degrees of freedom of mechanical workpieces with very high resolution is investigated. A prototype system based on this approach has been designed and built. Although the system is not fully optimized, our proposed system has already demonstrated some promising results. Using a thermally compensated laser source together with a pinhole spatial filtering system, we have demonstrated that lateral resolution better than 50 nm and angular displacement resolution better than 0.25 ?rad is achievable with this system.
Neville K. S. Lee, Neville K. S. Lee, Yimin Cai, Yimin Cai, Ajay Joneja, Ajay Joneja, } "High-resolution multidimensional displacement monitoring system," Optical Engineering 36(8), (1 August 1997). https://doi.org/10.1117/1.601521 . Submission:
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