1 August 1997 Interferometric measurements of small-scale surface irregularities: source of errors
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Optical Engineering, 36(8), (1997). doi:10.1117/1.601460
Abstract
Interferometry has been used widely to evaluate the largescale deviations from flatness of optical surfaces. However, when making measurements of small-scale irregularities with very small amplitudes, over a wide range of spatial frequencies, errors can arise due to scattered light and the transfer function of the imaging system. A theoretical analysis of these errors showing how they can be minimized is presented.
Parameswaran Hariharan, "Interferometric measurements of small-scale surface irregularities: source of errors," Optical Engineering 36(8), (1 August 1997). http://dx.doi.org/10.1117/1.601460
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KEYWORDS
Spatial frequencies

Charge-coupled devices

Modulation transfer functions

Light scattering

Imaging systems

Interferometry

Stray light

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