New technique to produce buried channel waveguides in glass

Serge Pelissier; Florent Pigeon; B. Biasse; M. Zussy; Gregory Pandraud; Alain Mure-Ravaud

doi:10.1117/1.601647

1 April 1998 New technique to produce buried channel waveguides in glass

Serge Pelissier, Florent Pigeon, B. Biasse, M. Zussy, Gregory Pandraud, Alain Mure-Ravaud

Optical Engineering, Vol. 37, Issue 4, (April 1998). https://doi.org/10.1117/1.601647

We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by lowtemperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distribution.

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Serge Pelissier, Florent Pigeon, B. Biasse, M. Zussy, Gregory Pandraud, and Alain Mure-Ravaud "New technique to produce buried channel waveguides in glass," Optical Engineering 37(4), (1 April 1998). https://doi.org/10.1117/1.601647

Published: 1 April 1998

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