Interferometer distance measurement system using a linear detector array

Yuxian Xu; Qingxiang Li; Shifu Xue; Jian Wang; Dong-Xiao Huang; Lianqing Zhang

doi:10.1117/1.601746

1 August 1998 Interferometer distance measurement system using a linear detector array

Yuxian Xu, Qingxiang Li, Shifu Xue, Jian Wang, Dong-Xiao Huang, Lianqing Zhang

Optical Engineering, Vol. 37, Issue 8, (August 1998). https://doi.org/10.1117/1.601746

The principle and structure of a new self-scanning laser interferometer are introduced. The output of a self-scanning photodiode array is modulated to generate an ac measurement signal, thereby avoiding dc drift and low-frequency disturbances. Experiments show that the device can be used in the range of 100 mm and with a resolution of less than 0.02µm.

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Yuxian Xu, Qingxiang Li, Shifu Xue, Jian Wang, Dong-Xiao Huang, and Lianqing Zhang "Interferometer distance measurement system using a linear detector array," Optical Engineering 37(8), (1 August 1998). https://doi.org/10.1117/1.601746

Published: 1 August 1998

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