1 April 1998 New technique to produce buried channel waveguides in glass
Author Affiliations +
Optical Engineering, 37(4), (1998). doi:10.1117/1.601647
Abstract
We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by lowtemperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distribution.
Serge Pelissier, Florent Pigeon, B. Biasse, M. Zussy, Gregory Pandraud, Alain Mure-Ravaud, "New technique to produce buried channel waveguides in glass," Optical Engineering 37(4), (1 April 1998). http://dx.doi.org/10.1117/1.601647
JOURNAL ARTICLE
4 PAGES


SHARE
KEYWORDS
Channel waveguides

Semiconducting wafers

Waveguides

Ion exchange

Wafer bonding

Glasses

Image processing

Back to Top