1 April 1998 Sol-gel waveguide fabrication parameters: an experimental investigation
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Optical Engineering, 37(4), (1998). doi:10.1117/1.601833
Abstract
Waveguides have been fabricated by a hybrid organic- inorganic glass sol-gel process and ultraviolet-light exposure. The adjustment of chemical composition of the materials provides precise selection of the refractive index from 1.48 to 1.52 at the wavelength of 632.8 nm. The effect of ultraviolet-light exposure and heat treatment on the refractive index is studied. Ultraviolet-light inscription has been employed to produce ridge waveguides with smooth sidewalls.
Xin M. Du, Tahar Touam, L. Degachi, J. L. Guilbault, Mark P. Andrews, S. Iraj Najafi, "Sol-gel waveguide fabrication parameters: an experimental investigation," Optical Engineering 37(4), (1 April 1998). http://dx.doi.org/10.1117/1.601833
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KEYWORDS
Sol-gels

Waveguides

Refractive index

Zirconium

Ultraviolet radiation

Aluminum

Silicon

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