1 May 1998 Evaluation of hydroxyl content in commercial X-cut LiNbO3 wafers for optical waveguide devices
Author Affiliations +
Optical Engineering, 37(5), (1998). doi:10.1117/1.601675
Abstract
Usually the quality of commercial LiNbO3 (LN) wafers is checked by their crystalline homogeneity. In X cut wafers, which are labeled for optical waveguide applications, however, the existence of a significant change in the hydroxyl content along the polarized Z axis is found by Fourier transform IR (FTIR) spectrometry, although a corresponding inhomogeneity was not observed about the lattice parameters, the Li and Nb contents, and the optical birefringence parameters. Such a difference in hydroxyl content might influence quality and stability of the obtained waveguides, and one should consider this before designing waveguide devices and fabrication processes.
Hirotoshi Nagata, "Evaluation of hydroxyl content in commercial X-cut LiNbO3 wafers for optical waveguide devices," Optical Engineering 37(5), (1 May 1998). http://dx.doi.org/10.1117/1.601675
JOURNAL ARTICLE
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KEYWORDS
Semiconducting wafers

Crystals

Wafer-level optics

Waveguides

Birefringence

Ions

Lithium

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