1 May 1998 Evaluation of hydroxyl content in commercial X-cut LiNbO3 wafers for optical waveguide devices
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Abstract
Usually the quality of commercial LiNbO3 (LN) wafers is checked by their crystalline homogeneity. In X cut wafers, which are labeled for optical waveguide applications, however, the existence of a significant change in the hydroxyl content along the polarized Z axis is found by Fourier transform IR (FTIR) spectrometry, although a corresponding inhomogeneity was not observed about the lattice parameters, the Li and Nb contents, and the optical birefringence parameters. Such a difference in hydroxyl content might influence quality and stability of the obtained waveguides, and one should consider this before designing waveguide devices and fabrication processes.
Hirotoshi Nagata, Hirotoshi Nagata, } "Evaluation of hydroxyl content in commercial X-cut LiNbO3 wafers for optical waveguide devices," Optical Engineering 37(5), (1 May 1998). https://doi.org/10.1117/1.601675 . Submission:
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