1 June 1998 Interferometeric straightness measurement system using triangular prisms
Author Affiliations +
Abstract
A new interferometric system for measuring straightness is developed. In the system, triangular prisms are used to generate two converging beams. A straightness reflector is used to reflect back the converging beams along their respective paths to form a combined beam. The combined beam is received by a detector system to count the interference fringes. Being different from the traditional straightness reflector, the new straightness reflector consists of not only reflecting surfaces but also refractive surfaces. The refractive surfaces cause a change in optical path difference (OPD) when a relative lateral displacement between the triangular prisms and the straightness reflector takes place. The relationship between the OPD and the lateral displacement is derived. The expected results agree with the results in the experiments. A straightness measurement with an accuracy of 0.1 µm is obtained over a travel range of 120 mm.
Ji-Hua Zhang, Ji-Hua Zhang, Lilong Cai, Lilong Cai, } "Interferometeric straightness measurement system using triangular prisms," Optical Engineering 37(6), (1 June 1998). https://doi.org/10.1117/1.601696 . Submission:
JOURNAL ARTICLE
5 PAGES


SHARE
RELATED CONTENT

Improved straightness interferometer for nanometrology
Proceedings of SPIE (February 09 2005)
Vibration Measurement By Closed-Loop Laser-Interferometry
Proceedings of SPIE (April 02 1989)
A New Optical Surface Microprofiling Instrument
Proceedings of SPIE (November 14 1983)

Back to Top