1 June 1998 White light interferometric surface profiler
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Abstract
We describe an optical system for 3-D profilometry based on the white light interferometer. Recently many different methods have been used to analyze the data obtained from white light interferometric profilers. Many commercially available white light profilers are also in use today. We detail a simple way to construct a profiler that uses two simple and efficient algorithms. It deals with the data in a fast and simple manner, thus reducing both the acquisition and analysis time. The system has a theoretically unlimited range and can profile both optically rough and smooth surfaces.
Brian W. Bowe, Vincent Toal, "White light interferometric surface profiler," Optical Engineering 37(6), (1 June 1998). https://doi.org/10.1117/1.601727
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