1 July 1998 Optical and x-ray characterization applied to multilayer reverse engineering
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Abstract
The complexity of optical thin film stacks leads to new techniques being developed for characterization of components after deposition. We show the complementarity between optical characterization techniques and grazing x-ray reflectivity. We illustrate the efficiency of that complementarity for the reverse engineering of a 7-layer mirror and a 50-layer bandpass filter.
Thierry Boudet, Thierry Boudet, M. Berger, M. Berger, Oliver Lartigue, Oliver Lartigue, B. Hirrien, B. Hirrien, } "Optical and x-ray characterization applied to multilayer reverse engineering," Optical Engineering 37(7), (1 July 1998). https://doi.org/10.1117/1.601700 . Submission:
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