The complexity of optical thin film stacks leads to new techniques being developed for characterization of components after deposition. We show the complementarity between optical characterization techniques and grazing x-ray reflectivity. We illustrate the efficiency of that complementarity for the reverse engineering of a 7-layer mirror and a 50-layer bandpass filter.
"Optical and x-ray characterization applied to multilayer reverse engineering," Optical Engineering 37(7), (1 July 1998). http://dx.doi.org/10.1117/1.601700