1 October 1999 Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer
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Abstract
A superluminescent diode interferometer that uses sinusoidal phase-modulating interferometry and the shifting method is applied to measure the front and rear surface profiles of a glass plate with an accuracy of a few nanometers. Since the roughness of the reference surface is large, a glass plate is put behind the object as another reference surface, which is estimated by the shifting method with an accuracy of a few nanometers.
Osami Sasaki, Osami Sasaki, Takayuki Nakada, Takayuki Nakada, Takamasa Suzuki, Takamasa Suzuki, } "Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer," Optical Engineering 38(10), (1 October 1999). https://doi.org/10.1117/1.602038 . Submission:
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