1 February 1999 High-efficiency flat-top beam shaper fabricated by a nonlithographic technique
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Abstract
We report a compact flat-top beam shaper fabricated by laser-assisted chemical etching upon an ion-exchanged high-energy- beam-sensitive glass. The beam shaper combines a phase filter element and a focusing lens element into a single diffractive optical element with a quasi-continuous surface relief profile. The fabrication takes advantage of the laser generation of gray-level patterns and one-step etching that are effective especially for such beam shaper fabrication. The demonstrated beam shaper with good flatness and edge features has an energy efficiency of 82%.
Xu Guang Huang, Xu Guang Huang, Michael R. Wang, Michael R. Wang, Changyuan Yu, Changyuan Yu, } "High-efficiency flat-top beam shaper fabricated by a nonlithographic technique," Optical Engineering 38(2), (1 February 1999). https://doi.org/10.1117/1.602255 . Submission:
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