1 April 1999 Passive pupil correction as applied to annular field systems
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Optical Engineering, 38(4), (1999). doi:10.1117/1.602108
Abstract
We present a technique to improve the performance of an annular field system that has a uniform aberration residual and an element at the stop or one of the pupils. The technique entails to departing from axial symmetry by introducing a nonaxially symmetric asphericity. Depending on the angular field extent an improvement in root mean square (rms) of 30% or more can be achieved.
Jose M. Sasian, "Passive pupil correction as applied to annular field systems," Optical Engineering 38(4), (1 April 1999). http://dx.doi.org/10.1117/1.602108
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KEYWORDS
Cameras

Wavefronts

Monochromatic aberrations

Fluctuations and noise

Mirrors

Optical engineering

Extreme ultraviolet lithography

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