1 June 1999 Optical roughness measurements using extended white-light interferometry
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Optical Engineering, 38(6), (1999). doi:10.1117/1.602154
Roughness measurements of engineering surfaces are an important and interesting application for optical sensors. The increased speed, the ability to measure 3-D profiles, and the noncontact mode of optical sensors are of great interest for practical uses. A most challenging task is achieving comparability to the established methods, such as tactile stylus sensors, which are the most commonly used instruments in industry. We show that white-light interferometry is a useful method to measure in a microscopic range as well as with an extended field of view. The determination of the fringe contrast as a function of the focus position enables highly resolved data acquisition on engineering surfaces with a mean roughness of the order of a few nanometers to several micrometers. The measurements show that amplitude roughness parameters of engineering surfaces are not strongly affected by the spatial resolution. A good agreement between the results of a stylus sensor and the results of our optical method are demonstrated on different types of surfaces.
Robert Windecker, Hans J. Tiziani, "Optical roughness measurements using extended white-light interferometry," Optical Engineering 38(6), (1 June 1999). http://dx.doi.org/10.1117/1.602154


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