1 January 2000 Absolute 3-D shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection
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Optical Engineering, 39(1), (2000). doi:10.1117/1.602336
Abstract
For the absolute and shade-free shape measurement of 3-D objects with large height discontinuities, a coaxial optical sensor system with a common image plane for pattern projection and observation is proposed. Experimental results are presented that demonstrate the shape measurements of objects with a deep hole and large discontinuities.
Mitsuo Takeda, Takahiro Aoki, Yoko Miyamoto, Hideyuki Tanaka, Ruowei Gu, Zhibo Zhang, "Absolute 3-D shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection," Optical Engineering 39(1), (1 January 2000). http://dx.doi.org/10.1117/1.602336
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KEYWORDS
Fringe analysis

Optical transfer functions

Fourier transforms

3D metrology

Confocal microscopy

Microscopes

Image sensors

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