1 January 2000 Direct shape measurement by digital wavefront reconstruction and multi-wavelength contouring
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Optical Engineering, 39(1), (2000). doi:10.1117/1.602338
Abstract
We present a direct holographic multiwavelength contouring technique for shape measurement of microcomponents with large height steps and/or spatially isolated object areas. The measurement is based on the digital recording and reconstruction of wavefronts using a CCD sensor. Absolute phase measurement is ensured by multiwavelength contouring. Consequently the whole measurement procedure delivers a direct and unambiguous approach to the continuous phase without unwrapping. An algorithm is presented to chose a minimum number of different wavelengths to improve the accuracy of the phase measurement. The results are verified by an experimental setup and some practical examples.
Chr. Wagner, Wolfgang Osten, Soenke Seebacher, "Direct shape measurement by digital wavefront reconstruction and multi-wavelength contouring," Optical Engineering 39(1), (1 January 2000). http://dx.doi.org/10.1117/1.602338
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