1 October 2000 Radial shearing interferometer for in-process measurement of diamond turning
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Abstract
A stable interferometer with two zone plates to measure a concave mirror figure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test is referred to that from the central part. On-machine experiments show that the interferometer is stable and compact enough to be applicable to in-process measurement for diamond turning at about 0.06 ?m p-v accuracy.
Tsuguo Kohno, Daiji Matsumoto, Takanori Yazawa, Yutaka Uda, "Radial shearing interferometer for in-process measurement of diamond turning," Optical Engineering 39(10), (1 October 2000). https://doi.org/10.1117/1.1290463
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