Properties of digital holography based on in-line configuration

Lei Xu; Jianmin Miao; Anand Krishna Asundi

doi:10.1117/1.1327503

1 December 2000 Properties of digital holography based on in-line configuration

Lei Xu, Jianmin Miao, Anand Krishna Asundi

Optical Engineering, Vol. 39, Issue 12, (December 2000). https://doi.org/10.1117/1.1327503

Digital holography for micromeasurement is an active research topic. With respect to the requirement of realizing characterization of micro-scale structures in microelectromechanical systems with high resolution and accuracy, in-line configuration is studied in this paper as the fundamental structure of a digital holography system. A mathematical model based on Fourier optics is developed to analyze the digital recording mechanism and properties of the system in comparison with those of the commonly used off-axis arrangement. Theoretical analysis and experimental results demonstrate that in-line configuration is advantageous in enhancing the system performance. Besides the relaxed requirement of spatial resolution on the CCD sensors and the greater flexibility of the system, higher lateral resolution and lower speckle noise can be achieved.

Citation Download Citation

Lei Xu, Jianmin Miao, and Anand Krishna Asundi "Properties of digital holography based on in-line configuration," Optical Engineering 39(12), (1 December 2000). https://doi.org/10.1117/1.1327503

Published: 1 December 2000

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available