1 March 2000 Precompensation approach for improving the quality of laser direct writing patterns by a modified proximity function
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Abstract
By applying energy conservation to the effect of a laser beam on a resist, a modified proximity function is proposed. The measured data on energy absorption in a photoresist are fitted well with the modified function. By using the new model, an effective precompensation method can be used to correct proximity effects in laser direct writing. Experimental results have been obtained on a laser direct writing machine with line width of 0.6 ?m.
Jinglei Du, Jinglei Du, Fuhua Gao, Fuhua Gao, Yongkang Guo, Yongkang Guo, Chunlei Du, Chunlei Du, Chuankai Qiu, Chuankai Qiu, Zheng Cui, Zheng Cui, } "Precompensation approach for improving the quality of laser direct writing patterns by a modified proximity function," Optical Engineering 39(3), (1 March 2000). https://doi.org/10.1117/1.602426 . Submission:
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