1 April 2000 Diamond-like carbon thin films as antireflective and protective coatings of GaAs elements and devices
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Abstract
Diamond-like carbon (DLC) films were deposited directly on GaAs substrates by a capacitively coupled 13.56 MHz glow discharge in a CH4 plasma. The deposition process for antireflective DLC coating deposition on GaAs was optimized. DLC films of different thicknesses were deposited to investigate IR spectral characteristics. DLC films on GaAs increased microhardness from 500 kg/mm2 for the uncoated substrate to 1200 kg/mm2. The spectral transmittance of the bare and coated substrates in the 2.5 < ? < 16.5 ?m region was measured. DLC layer thickness affects the optical transmittance of the coated substrate. The peak transmittance with DLC coatings on both sides of the substrate reaches 95%, with about 1% absorption and 4% reflection.
Lev Klibanov, Nathan I. Croitoru, Ady Seidman, Mordechai Gilo, Reuben Dahan, "Diamond-like carbon thin films as antireflective and protective coatings of GaAs elements and devices," Optical Engineering 39(4), (1 April 2000). https://doi.org/10.1117/1.602448 . Submission:
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