1 April 2000 Phase-shifting interferometry: minimization of systematic errors
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Abstract
Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique.
Parameswaran Hariharan, "Phase-shifting interferometry: minimization of systematic errors," Optical Engineering 39(4), (1 April 2000). https://doi.org/10.1117/1.602443 . Submission:
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