1 April 2000 Three channel phase-shifting interferometer using polarization-optics and a diffraction grating
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Optical Engineering, 39(4), (2000). doi:10.1117/1.602453
Abstract
A modified Michelson interferometer is described by which three, by - ?/2, 0 and + ?/2 phase-shifted interferograms can be taken simultaneously by a single CCD camera using a binary diffraction grating and polarization optics. Hence measurements of dynamic events and in adverse conditions are possible. The experimental setup, first results and a mathematical error analysis are presented.
Andrea Hettwer, Jochen Kranz, Johannes Schwider, "Three channel phase-shifting interferometer using polarization-optics and a diffraction grating," Optical Engineering 39(4), (1 April 2000). http://dx.doi.org/10.1117/1.602453
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KEYWORDS
Phase shifts

Diffraction gratings

Interferometers

Cameras

Etching

Polarization

Error analysis

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