1 May 2000 Testing layered synthetic microstructures by computer processing of their digitized electron-microscope cross sections
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Abstract
Recently, a method was developed for determining interface profiles of extreme-ultraviolet layered synthetic microstructures (LSMs), which is based on computer processing of digitized LSM electron micrographs. Nickel/carbon and molybdenum/carbon multilayers are studied and analyzed in order to show the potentialities of the method in controlling the uniformity of the period and the thickness of the layers when LSMs are manufactured. Such a method makes it possible to get information about the quality of LSMs on a nanometer scale.
Marc-Olivier Flaissier, Georges Rasigni, Monique Rasigni, Christophe Guichet, "Testing layered synthetic microstructures by computer processing of their digitized electron-microscope cross sections," Optical Engineering 39(5), (1 May 2000). https://doi.org/10.1117/1.602502
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