1 June 2000 Method for the deviation inspection of integrated circuit chip pin based on Harr wavelet transform
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Abstract
A fast method for chip pin location inspection based on the Harr wavelet transform is presented. A cross line at the pin tip is analyzed, and the method locates the central line of a pin according to the zero crossing position of the transform of the 1-D cross line without theoretical error. The requirement of being theoretically error free is that the constant segment of the pin image is wider than 2 pixels. The experiment shows a measurement precision of 1/40 pixel.
Gang Luo, Gang Luo, Hui Fang, Hui Fang, ZhiLiang Fang, ZhiLiang Fang, Guoguang Mu, Guoguang Mu, } "Method for the deviation inspection of integrated circuit chip pin based on Harr wavelet transform," Optical Engineering 39(6), (1 June 2000). https://doi.org/10.1117/1.602549 . Submission:
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