1 December 2001 Submicron holes in copper thin film directly ablated using femtosecond pulsed laser
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Abstract
The ability to machine very small features in material has a wide range of applications in semiconductor microelectronics, such as laser dye etching of ICs. Femtosecond-pulse laser pulses have been shown to hold great potential for high-precision micromachining. The extremely short duration of a femtosecond pulse highly limits heat diffusion, resulting in clean and defect-free ablation, making highprecision micromachining achievable.
© (2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
B. K. A. Ngoi, B. K. A. Ngoi, Krishnan Venkatakrishnan, Krishnan Venkatakrishnan, Beng Heok Tan, Beng Heok Tan, } "Submicron holes in copper thin film directly ablated using femtosecond pulsed laser," Optical Engineering 40(12), (1 December 2001). https://doi.org/10.1117/1.1419024 . Submission:
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