1 April 2001 Optically interrogated MEMS pressure sensors for propulsion applications
Author Affiliations +
Abstract
Pressure sensors suitable for propulsion applications that utilize interrogation by fiber optics are described. To be suitable for many propulsion applications, sensors should have fast response, have a configuration that can be readily incorporated into sensor arrays, and be able to survive harsh environments. Microelectromechanical systems (MEMS) technology is utilized here for sensor fabrication. Optically interrogated MEMS devices are expected to eventually be more suitable than electrically interrogated MEMS devices for many propulsion applications involving harsh environments. Pressure-sensor elements are formed by etching shallow cavities in glass substrates followed by anodic bonding of silicon onto the glass over the cavity. The silicon is subsequently etched to form the pressure-sensitive diaphragm. Light emerging from a fiber is then used to interferometrically detect diaphragm deflection due to external pressure. Experimental results for static and dynamic pressure tests carried out in a shock tube demonstrate reasonable linearity, sensitivity, and time response.
© (2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
Jie Zhou, Jie Zhou, Samhita Dasgupta, Samhita Dasgupta, Hiroshi Kobayashi, Hiroshi Kobayashi, J. Mitch Wolff, J. Mitch Wolff, Howard E. Jackson, Howard E. Jackson, Joseph T. Boyd, Joseph T. Boyd, } "Optically interrogated MEMS pressure sensors for propulsion applications," Optical Engineering 40(4), (1 April 2001). https://doi.org/10.1117/1.1354629 . Submission:
JOURNAL ARTICLE
7 PAGES


SHARE
RELATED CONTENT

Fiber optic hydrocarbon sensor system
Proceedings of SPIE (March 01 1992)
Fiber optic electric-field microsensor
Proceedings of SPIE (March 05 1993)
Optical interconnects for multichip modules
Proceedings of SPIE (June 03 1994)
Development of a new optical acceleration sensor
Proceedings of SPIE (November 21 2007)

Back to Top