1 May 2001 Determination of phase-step errors of kinoform gratings from their diffraction efficiencies
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Optical Engineering, 40(5), (2001). doi:10.1117/1.1358296
Abstract
Phase-step heights of a kinoform grating are determined from its diffraction efficiencies. The diffraction orders of the measured kinoform grating are compared with theoretical ones of the pure phase- stepped grating, and then, by a minimization procedure, the set of heights of the phase steps is found.
Zbigniew Jaroszewicz, Andrzej Kolodziejczyk, Andrzej Kowalik, Roberto Restrepo, "Determination of phase-step errors of kinoform gratings from their diffraction efficiencies," Optical Engineering 40(5), (1 May 2001). http://dx.doi.org/10.1117/1.1358296
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KEYWORDS
Diffraction

Diffraction gratings

Computer generated holography

Lithography

Transmittance

Profilometers

Error analysis

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