1 May 2001 Optical profilometer based on the principle of differential interference
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Abstract
An optical profilometer based on the principle of differential interference has been developed. Using a common-light-path interference scheme, the instrument is insensitive to vibration, air turbulence, and temperature variation. Experimental results demonstrate that the vertical resolution and the repeatability of the instrument are both better than 1 nm in an ordinary environment.
Qingxiang Li, Hong Gao, Shifu Xue, Yuhe Li, "Optical profilometer based on the principle of differential interference," Optical Engineering 40(5), (1 May 2001). https://doi.org/10.1117/1.1359794
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