1 May 2001 Optical profilometer based on the principle of differential interference
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Abstract
An optical profilometer based on the principle of differential interference has been developed. Using a common-light-path interference scheme, the instrument is insensitive to vibration, air turbulence, and temperature variation. Experimental results demonstrate that the vertical resolution and the repeatability of the instrument are both better than 1 nm in an ordinary environment.
© (2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
Qingxiang Li, Qingxiang Li, Hong Gao, Hong Gao, Shifu Xue, Shifu Xue, Yuhe Li, Yuhe Li, } "Optical profilometer based on the principle of differential interference," Optical Engineering 40(5), (1 May 2001). https://doi.org/10.1117/1.1359794 . Submission:
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