Study of thin-film SO2 gas sensors by photometric and ellipsometric methods

Zhaosheng Tang; Zhengxiu Fan; Jian-Da Shao

doi:10.1117/1.1357805

Abstract

Pt-, Pd-, and Zr-doped SnO2 thin films and dopant-free VOx films were fabricated by planar magnetron sputtering. Tests for sensitivity to SO2 for all samples were conducted at 180Â°C, and the sensitivities were investigated exsitu with photometric and ellipsometric methods at room temperature. It was found that the optical sensitivities as well as the sensitive wavelength region for SnO2 films could be tuned by doping. The Pd-doped SnO2 films had good sensitivity in the visible range, and the Zr-doped in the near IR. The dominant sensitive wavelength region for VOx films fell into the visible range, and the ratio of the sensitivity in the visible to that in the near IR increased with O2/Ar in the depositing atmosphere.

Citation Download Citation

Zhaosheng Tang, Zhaosheng Tang, Zhengxiu Fan, Zhengxiu Fan, Jian-Da Shao, Jian-Da Shao, } "Study of thin-film SO2 gas sensors by photometric and ellipsometric methods," Optical Engineering 40(5), (1 May 2001). https://doi.org/10.1117/1.1357805 . Submission:

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