1 July 2001 Low numerical aperture refractive microlenses in fused silica
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Optical Engineering, 40(7), (2001). doi:10.1117/1.1385335
Abstract
The realization of high quality refractive microlenses is well known and has been reported several times in the past.1 Various fabrication techniques have been used to obtain accurate surface-relief refractive microlenses. Well known are direct writing techniques and graytone lithography.
Philippe Nussbaum, Hans Peter Herzig, "Low numerical aperture refractive microlenses in fused silica," Optical Engineering 40(7), (1 July 2001). http://dx.doi.org/10.1117/1.1385335
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KEYWORDS
Microlens

Photoresist materials

Silica

Etching

Reactive ion etching

Spherical lenses

Mach-Zehnder interferometers

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