Shadow moire profilometry by frequency sweeping

Lianhua Jin; Yukitoshi Otani; Toru Yoshizawa

doi:10.1117/1.1385170

Abstract

A frequency-sweeping technique is proposed to measure the shape of objects with discontinuous height steps and/or spatially separated surfaces, which have been impossible to measure with conventional shadow moirè topography. By controlling the rotation angle of the grating, spatiotemporal moirè patterns are produced with different contour intervals. The Fourier-transform technique has been applied to analyze these patterns and obtain the temporal carrier frequency, to which the height distribution of the object is related. Experimental results show the validity of this method.

Citation Download Citation

Lianhua Jin, Lianhua Jin, Yukitoshi Otani, Yukitoshi Otani, Toru Yoshizawa, Toru Yoshizawa, } "Shadow moire profilometry by frequency sweeping," Optical Engineering 40(7), (1 July 2001). https://doi.org/10.1117/1.1385170 . Submission:

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