1 August 2001 A novel one-step method of microlens mold array fabrication
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We present a novel method for fabricating microlens mold arrays. The mold array is fabricated using focused-ion-beam milling (FIBM) on a substrate of bulk SI. The 2-D profiles and surface roughnesses of the fabricated molds are measured using a laser interferometer. Finally, the mold array is used for hot embossed molding. The surface roughnesses of the mold and the replica are 2.5 and 8 nm, respectively. We define surface roughness as the arithmetic mean of the absolute departure of the roughness profile from the mean line. A profile of the replica is acceptable for practical use. The measured size of the replica corresponds well with that of designed array.
Yongqui Fu, Bryan Kok Ann Ngoi, "A novel one-step method of microlens mold array fabrication," Optical Engineering 40(8), (1 August 2001). https://doi.org/10.1117/1.1385337

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