1 August 2001 A novel one-step method of microlens mold array fabrication
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Abstract
We present a novel method for fabricating microlens mold arrays. The mold array is fabricated using focused-ion-beam milling (FIBM) on a substrate of bulk SI. The 2-D profiles and surface roughnesses of the fabricated molds are measured using a laser interferometer. Finally, the mold array is used for hot embossed molding. The surface roughnesses of the mold and the replica are 2.5 and 8 nm, respectively. We define surface roughness as the arithmetic mean of the absolute departure of the roughness profile from the mean line. A profile of the replica is acceptable for practical use. The measured size of the replica corresponds well with that of designed array.
© (2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yongqui Fu, Yongqui Fu, Bryan Kok Ann Ngoi, Bryan Kok Ann Ngoi, } "A novel one-step method of microlens mold array fabrication," Optical Engineering 40(8), (1 August 2001). https://doi.org/10.1117/1.1385337 . Submission:
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