1 August 2001 One-grating projection for absolute three-dimensional profiling
Author Affiliations +
Abstract
A new method for absolute 3-D profiling, based on the fringe projection technique using a vertical scan mode, is described. With a combined measurement of the modulation and the phase it is possible to acquire the topography without any ambiguity problems by using one grating period only. Consequently, the vertical measurement range is limited only by the free working distance and the resolution is comparable to standard fringe projection techniques. We present a microscopic solution, based on a zoom stereo microscope, which enables interesting applications in an extended microscopic range, such as the measurement of microcomponents and microshapes, for example.
© (2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
Klaus Koerner, Robert Windecker, Matthias Fleischer, Hans J. Tiziani, "One-grating projection for absolute three-dimensional profiling," Optical Engineering 40(8), (1 August 2001). https://doi.org/10.1117/1.1385509 . Submission:
JOURNAL ARTICLE
8 PAGES


SHARE
RELATED CONTENT

Optical computer for an acoustic microscope
Proceedings of SPIE (February 05 1996)
High-speed optical 3D roughness measurements
Proceedings of SPIE (September 21 1999)
The set of the detection and resolution criteria for a...
Proceedings of SPIE (August 08 2006)
Phase-Locked Interferometry
Proceedings of SPIE (November 21 1977)

Back to Top