1 August 2001 One-grating projection for absolute three-dimensional profiling
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Optical Engineering, 40(8), (2001). doi:10.1117/1.1385509
Abstract
A new method for absolute 3-D profiling, based on the fringe projection technique using a vertical scan mode, is described. With a combined measurement of the modulation and the phase it is possible to acquire the topography without any ambiguity problems by using one grating period only. Consequently, the vertical measurement range is limited only by the free working distance and the resolution is comparable to standard fringe projection techniques. We present a microscopic solution, based on a zoom stereo microscope, which enables interesting applications in an extended microscopic range, such as the measurement of microcomponents and microshapes, for example.
Klaus Koerner, Robert Windecker, Matthias Fleischer, Hans J. Tiziani, "One-grating projection for absolute three-dimensional profiling," Optical Engineering 40(8), (1 August 2001). http://dx.doi.org/10.1117/1.1385509
JOURNAL ARTICLE
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KEYWORDS
Modulation

Sensors

Microscopes

Phase shift keying

Interferometry

3D metrology

Optical interferometry

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